Inventor
LINDFORS SVEN
FI32 patents
⚠️ This page may combine multiple inventors who share the name “LINDFORS SVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT
9 patentsUS7601223B2Oct 13, 2009
Showerhead assembly and ALD methods
ASM INT607 citations99
US6939579B2Sep 6, 2005
ALD reactor and method with controlled wall temperature
ASM INT372 citations98
US7799300B2Sep 21, 2010
Method and apparatus for removing substances from gases
ASM INT374 citations96
US7537662B2May 26, 2009
Method and apparatus for depositing thin films on a surface
ASM INT46 citations96
US7105054B2Sep 12, 2006
Method and apparatus of growing a thin film onto a substrate
ASM INT41 citations92
US7037372B2May 2, 2006
Method of growing a thin film onto a substrate
ASM INT17 citations92
US7018478B2Mar 28, 2006
Method of growing a thin film onto a substrate
ASM INT23 citations92
US6783590B2Aug 31, 2004
Method of growing a thin film onto a substrate
ASM INT23 citations92
US7060132B2Jun 13, 2006
Method and apparatus of growing a thin film
ASM INT12 citations84
PICOSUN OY
6 patentsUS9868131B2Jan 16, 2018
Atomic layer deposition with plasma source
PICOSUN OY414 citations98
US8753716B2Jun 17, 2014
Method of depositing material using a deposition reactor
PICOSUN OY4 citations73
US12454754B2Oct 28, 2025
Atomic layer deposition reactor comprising a top-loading reaction chamber configured to carry a batch of vertically oriented substrates
PICOSUN OY0 citations62
US12383923B2Aug 12, 2025
Atomic layer deposition with plasma source
PICOSUN OY0 citations62
US10011904B2Jul 3, 2018
Atomic layer deposition apparatus and loading methods
PICOSUN OY0 citations44
US11326254B2May 10, 2022
Protecting an interior of a gas container with an ALD coating
PICOSUN OY0 citations42
LINDFORS SVEN
4 patentsUS8741062B2Jun 3, 2014
Apparatus and methods for deposition reactors
LINDFORS SVEN429 citations98
US8211235B2Jul 3, 2012
Apparatuses and methods for deposition of material on surfaces
LINDFORS SVEN23 citations85
US10041169B2Aug 7, 2018
System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor
LINDFORS SVEN2 citations72
US8282334B2Oct 9, 2012
Atomic layer deposition apparatus and loading methods
LINDFORS SVEN0 citations43