Inventor

STAMM UWE

DE58 patents

⚠️ This page may combine multiple inventors who share the name “STAMM UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STAMM UWE

LAMBDA PHYSIK AG

Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers

Very stable excimer or molecular fluorine laser

Line-narrowing module for high power laser

Molecular fluorine laser with spectral linewidth of less than 1 pm

Molecular fluorine laser with spectral linewidth of less than 1 pm

Precise monitor etalon calibration technique

Preionization arrangement for gas laser

Method and apparatus for wavelength calibration

Resonator for single line selection

Discharge unit for a high repetition rate excimer or molecular fluorine laser

Discharge unit for a high repetition rate excimer or molecular fluorine laser

Method and apparatus for wavelength calibration

Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines

Corona preionization assembly for a gas laser

Method and procedure to automatically stabilize excimer laser output parameters

Laser beam monitoring apparatus and method

Molecular fluorine laser with spectral linewidth of less than 1 pm

Molecular fluorine (F2) laser with narrow spectral linewidth

Surface preionization for gas lasers

Wavelength and bandwidth monitor for excimer or molecular fluorine laser

Molecular fluorine laser with spectral linewidth of less than 1 pm

Line-narrowing module for high power laser

Molecular fluorine (F2) excimer laser with reduced coherence length

Laser gas replenishment method

Discharge unit for a high repetition rate excimer or molecular fluorine laser

Discharge unit for a high repetition rate excimer or molecular fluorine laser

Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines

Detector with frequency converting coating

Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser

Electrical excitation circuit for a pulsed gas laser

Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser

LAMBDA PHYSIK GMBH

Diode pumped laser with frequency conversion into UV and DUV range

Method and apparatus for wavelength calibration

Hybrid laser resonator with special line narrowing

Tunable narrowband source of a coherent radiation

Stabilization of angular and lateral laser beam position

Tunable source of narrowband coherent radiation

Tunable narrowband optical parametrical oscillator

Method and solid-state laser system for generating laser pulses with a variable pulse repetition frequency and constant beam characteristics

Solid state laser and a method of adjusting the pulse energy of a solid state laser

Q-switched solid-state laser

Tunable, optical parametric oscillator

Laser arrangement for generating narrow-band, tunable coherent radiation

XTREME TECH GMBH

Arrangement for monitoring the energy radiated by an EUV radiation source

Radiation source for generating extreme ultraviolet radiation

Method and device for producing extreme ultraviolet radiation or soft X-ray radiation

LAMBA PHYSIK GMBH

Molecular fluorine (F2) laser with narrow spectral linewidth

XTREME TECHNOLOGIES GBMH

Radiation source with high average EUV radiation output

LAMBDA PHYSIK GESSELLSCHAFT ZU

Production of narrow-band coherent radiation by using at least one optical parametric oscillator

LAMBDA GES ZUR HERSTELLUNG VON

Optical decoupling arrangement for laser beam