Inventor
SAEKI HIROAKI
JP62 patents
⚠️ This page may combine multiple inventors who share the name “SAEKI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
27 patentsUS6699003B2Mar 2, 2004
Carrying device
TOKYO ELECTRON LTD522 citations99
US6450757B1Sep 17, 2002
Conveyor system
TOKYO ELECTRON LTD549 citations99
US6053983AApr 25, 2000
Wafer for carrying semiconductor wafers and method detecting wafers on carrier
TOKYO ELECTRON LTD456 citations99
US5934856AAug 10, 1999
Multi-chamber treatment system
TOKYO ELECTRON LTD262 citations99
US5557215ASep 17, 1996
Self-bias measuring method, apparatus thereof and electrostatic chucking apparatus
TOKYO ELECTRON LTD146 citations99
US7837425B2Nov 23, 2010
Transportation apparatus and drive mechanism
TOKYO ELECTRON LTD1,055 citations98
US6338626B1Jan 15, 2002
Load-lock mechanism and processing apparatus
TOKYO ELECTRON LTD92 citations98
US5314541AMay 24, 1994
Reduced pressure processing system and reduced pressure processing method
TOKYO ELECTRON LTD127 citations98
US5223001AJun 29, 1993
Vacuum processing apparatus
TOKYO ELECTRON LTD128 citations98
US7090741B2Aug 15, 2006
Semiconductor processing system
TOKYO ELECTRON LTD59 citations96
US6540869B2Apr 1, 2003
Semiconductor processing system
TOKYO ELECTRON LTD68 citations96
US5460684AOct 24, 1995
Stage having electrostatic chuck and plasma processing apparatus using same
TOKYO ELECTRON LTD208 citations96
US5455082AOct 3, 1995
Reduced pressure processing system and reduced pressure processing method
TOKYO ELECTRON LTD69 citations95
US7857569B2Dec 28, 2010
Semiconductor processing system
TOKYO ELECTRON LTD35 citations93
US6522942B2Feb 18, 2003
Transfer apparatus for semiconductor process
TOKYO ELECTRON LTD28 citations93
US6499367B1Dec 31, 2002
Device and method for detecting substrate
TOKYO ELECTRON LTD40 citations93
US7622006B2Nov 24, 2009
Processed body carrying device, and processing system with carrying device
TOKYO ELECTRON LTD41 citations92
US7279067B2Oct 9, 2007
Port structure in semiconductor processing system
TOKYO ELECTRON LTD33 citations92
US6950721B2Sep 27, 2005
Positioning substrate for semiconductor process
TOKYO ELECTRON LTD33 citations92
US6802934B2Oct 12, 2004
Processing apparatus
TOKYO ELECTRON LTD33 citations92
US6466835B1Oct 15, 2002
Deadlock avoidance method and treatment system for object to be treated
TOKYO ELECTRON LTD22 citations92
US6984097B1Jan 10, 2006
Mounting/demounting device for wafer carrier lid
TOKYO ELECTRON LTD29 citations91
US6510365B1Jan 21, 2003
Carrier system positioning method
TOKYO ELECTRON LTD57 citations91
US6575691B1Jun 10, 2003
Transfer arm
TOKYO ELECTRON LTD15 citations84
US5857827AJan 12, 1999
Cassette chamber
TOKYO ELECTRON LTD19 citations83
US6068704AMay 30, 2000
Transfer arm apparatus and semiconductor processing system using the same
TOKYO ELECTRON LTD9 citations74
US6676356B2Jan 13, 2004
Device for attaching target substrate transfer container to semiconductor processing apparatus
TOKYO ELECTRON LTD12 citations73
HITACHI LTD
9 patentsUS7406946B1Aug 5, 2008
Method and apparatus for attenuating fuel pump noise in a direct injection internal combustion chamber
HITACHI LTD62 citations97
US6543412B2Apr 8, 2003
Intake air control device and internal combustion engine mounting the same
HITACHI LTD72 citations96
US7427860B2Sep 23, 2008
Module to control a rotating output shaft and a module to change a driving condition of vehicle
HITACHI LTD15 citations92
US6820864B2Nov 23, 2004
Fuel vaporization promoting apparatus and fuel carburetion accelerator
HITACHI LTD20 citations92
US5188073AFeb 23, 1993
Fluid control valve, valve support member therefor and idling air amount control apparatus for automobile using the fluid control valve
HITACHI LTD32 citations92
US7527038B2May 5, 2009
Method and apparatus for attenuating fuel pump noise in a direct injection internal combustion chamber
HITACHI LTD15 citations84
US6508236B2Jan 21, 2003
Fuel supply device and internal combustion engine mounting the same
HITACHI LTD15 citations84
US8038178B2Oct 18, 2011
High pressure fuel pipe construction for an internal combustion engine
HITACHI LTD8 citations83
US6776142B2Aug 17, 2004
Apparatus and method for supplying fuel in internal combustion engine with variable valve lifter
HITACHI LTD8 citations74
HITACHI CAR ENG CO LTD
5 patentsUS7247004B2Jul 24, 2007
Electronically controlled actuator
HITACHI CAR ENG CO LTD21 citations92
US7215115B2May 8, 2007
Module to control a rotating output shaft and module to change a driving condition of vehicle
HITACHI CAR ENG CO LTD26 citations92
US6931957B2Aug 23, 2005
Module to control a rotating output shaft and a module to change a driving condition of a vehicle
HITACHI CAR ENG CO LTD19 citations92
US7093426B2Aug 22, 2006
Starting apparatus, starting method, control method and exhaust filtration apparatus of internal combustion engine
HITACHI CAR ENG CO LTD14 citations84
US7065966B2Jun 27, 2006
Position control method by motor drive and control unit
HITACHI CAR ENG CO LTD13 citations84
HARVEY WILLIAM T
3 patentsTOKYO ELECTRONIC LIMITED
1 patentNIHON DENSAN KK
1 patentHITACHI AUTOMOTIVE PRODUCTS USA INC
1 patentSHINKO ELECTRIC CO LTD
1 patentHOHKITA ATSUSHI
1 patentHITACHI AUTOMOTIVE SYSTEMS AMERICAS INC
1 patentShowing the top 50 of 62 patents by PatentIndex Score.