P

Inventor

SAEKI HIROAKI

JP62 patents
⚠️ This page may combine multiple inventors who share the name “SAEKI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

27 patents
US6699003B2Mar 2, 2004

Carrying device

TOKYO ELECTRON LTD522 citations99
US6450757B1Sep 17, 2002

Conveyor system

TOKYO ELECTRON LTD549 citations99
US6053983AApr 25, 2000

Wafer for carrying semiconductor wafers and method detecting wafers on carrier

TOKYO ELECTRON LTD456 citations99
US5934856AAug 10, 1999

Multi-chamber treatment system

TOKYO ELECTRON LTD262 citations99
US5557215ASep 17, 1996

Self-bias measuring method, apparatus thereof and electrostatic chucking apparatus

TOKYO ELECTRON LTD146 citations99
US7837425B2Nov 23, 2010

Transportation apparatus and drive mechanism

TOKYO ELECTRON LTD1,055 citations98
US6338626B1Jan 15, 2002

Load-lock mechanism and processing apparatus

TOKYO ELECTRON LTD92 citations98
US5314541AMay 24, 1994

Reduced pressure processing system and reduced pressure processing method

TOKYO ELECTRON LTD127 citations98
US5223001AJun 29, 1993

Vacuum processing apparatus

TOKYO ELECTRON LTD128 citations98
US7090741B2Aug 15, 2006

Semiconductor processing system

TOKYO ELECTRON LTD59 citations96
US6540869B2Apr 1, 2003

Semiconductor processing system

TOKYO ELECTRON LTD68 citations96
US5460684AOct 24, 1995

Stage having electrostatic chuck and plasma processing apparatus using same

TOKYO ELECTRON LTD208 citations96
US5455082AOct 3, 1995

Reduced pressure processing system and reduced pressure processing method

TOKYO ELECTRON LTD69 citations95
US7857569B2Dec 28, 2010

Semiconductor processing system

TOKYO ELECTRON LTD35 citations93
US6522942B2Feb 18, 2003

Transfer apparatus for semiconductor process

TOKYO ELECTRON LTD28 citations93
US6499367B1Dec 31, 2002

Device and method for detecting substrate

TOKYO ELECTRON LTD40 citations93
US7622006B2Nov 24, 2009

Processed body carrying device, and processing system with carrying device

TOKYO ELECTRON LTD41 citations92
US7279067B2Oct 9, 2007

Port structure in semiconductor processing system

TOKYO ELECTRON LTD33 citations92
US6950721B2Sep 27, 2005

Positioning substrate for semiconductor process

TOKYO ELECTRON LTD33 citations92
US6802934B2Oct 12, 2004

Processing apparatus

TOKYO ELECTRON LTD33 citations92
US6466835B1Oct 15, 2002

Deadlock avoidance method and treatment system for object to be treated

TOKYO ELECTRON LTD22 citations92
US6984097B1Jan 10, 2006

Mounting/demounting device for wafer carrier lid

TOKYO ELECTRON LTD29 citations91
US6510365B1Jan 21, 2003

Carrier system positioning method

TOKYO ELECTRON LTD57 citations91
US6575691B1Jun 10, 2003

Transfer arm

TOKYO ELECTRON LTD15 citations84
US5857827AJan 12, 1999

Cassette chamber

TOKYO ELECTRON LTD19 citations83
US6068704AMay 30, 2000

Transfer arm apparatus and semiconductor processing system using the same

TOKYO ELECTRON LTD9 citations74
US6676356B2Jan 13, 2004

Device for attaching target substrate transfer container to semiconductor processing apparatus

TOKYO ELECTRON LTD12 citations73

HITACHI LTD

9 patents

HITACHI CAR ENG CO LTD

5 patents

HARVEY WILLIAM T

3 patents

TOKYO ELECTRONIC LIMITED

1 patent

NIHON DENSAN KK

1 patent

HITACHI AUTOMOTIVE PRODUCTS USA INC

1 patent

SHINKO ELECTRIC CO LTD

1 patent

HOHKITA ATSUSHI

1 patent

HITACHI AUTOMOTIVE SYSTEMS AMERICAS INC

1 patent

Showing the top 50 of 62 patents by PatentIndex Score.