Inventor
IIZUKA SATORU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IIZUKA SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS6380684B1Apr 30, 2002
Plasma generating apparatus and semiconductor manufacturing method
HITACHI INT ELECTRIC INC34 citations91
US6238512B1May 29, 2001
Plasma generation apparatus
HITACHI INT ELECTRIC INC18 citations83
US6835279B2Dec 28, 2004
Plasma generation apparatus
HITACHI INT ELECTRIC INC7 citations72