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Inventor
SRINIVASAN LAKSHMAN
US
4 patents
⚠️ This page may combine multiple inventors who share the name “SRINIVASAN LAKSHMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRAPOINTE CORP
2 patents
US5808735A
Sep 15, 1998
Method for characterizing defects on semiconductor wafers
ULTRAPOINTE CORP
146 citations
97
US5798830A
Aug 25, 1998
Method of establishing thresholds for image comparison
ULTRAPOINTE CORP
16 citations
70
APPLIED MATERIALS INC
1 patent
US7065239B2
Jun 20, 2006
Automated repetitive array microstructure defect inspection
APPLIED MATERIALS INC
69 citations
92
PHOTON DYNAMICS INC
1 patent
US7761182B2
Jul 20, 2010
Automatic defect repair system
PHOTON DYNAMICS INC
23 citations
85