Inventor
MARIA DE RIDDER CHRISTIANUS GE
NL4 patents
Patents
4 patentsUS7202491B2Apr 10, 2007
Method for sensing wafers located inside a closed wafer cassette
ASM INT23 citations86
US7015492B2Mar 21, 2006
Method and apparatus for mapping of wafers located inside a closed wafer cassette
ASM INT16 citations86
US6573198B2Jun 3, 2003
Earthquake protection for semiconductor processing equipment
ASM INT22 citations84
US6623225B1Sep 23, 2003
Expandable bolt and use for fragile parts
ASM INT3 citations52