Inventor
ABE TOMOSHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ABE TOMOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TDK CORP
3 patentsUS9824907B2Nov 21, 2017
Gas purge apparatus, load port apparatus, and gas purge method
TDK CORP11 citations79
US11699228B2Jul 11, 2023
Arrangement detector for plate-shaped object and load port including same
TDK CORP0 citations50
US11646215B2May 9, 2023
Load port apparatus and method of driving the same
TDK CORP0 citations49