P

Inventor

EZAKI MASANOBU

JP6 patents
⚠️ This page may combine multiple inventors who share the name “EZAKI MASANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

3 patents
US9278881B2Mar 8, 2016

EUV lithography member, making method, and titania-doped quartz glass

SHINETSU CHEMICAL CO3 citations71
US10114280B2Oct 30, 2018

Titania-doped quartz glass and making method

SHINETSU CHEMICAL CO0 citations51
US9746773B2Aug 29, 2017

Titania-doped quartz glass and making method

SHINETSU CHEMICAL CO1 citations51

COVALENT MATERIALS CORP

1 patent
US7485593B2Feb 3, 2009

Titania-silica glass

COVALENT MATERIALS CORP14 citations76

MAIDA SHIGERU

1 patent
US9296636B2Mar 29, 2016

Titania doped quartz glass and making method

MAIDA SHIGERU0 citations50

TOSHIBA CERAMICS CO

1 patent
US7082789B2Aug 1, 2006

Silica glass member for semiconductor and production method thereof

TOSHIBA CERAMICS CO4 citations50