Inventor

Lin mao-cheng

TW3 patents

Patents

3 patents

US10864530B2Dec 15, 2020

Coating apparatus and method of forming coating film

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69

US9607873B2Mar 28, 2017

Apparatus and operation method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations69

US9573144B2Feb 21, 2017

Coating apparatus and method of forming coating film

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations69