Inventor
FRIEDRICH CHRISTOPH
DE5 patents
⚠️ This page may combine multiple inventors who share the name “FRIEDRICH CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
4 patentsUS6660437B2Dec 9, 2003
Alternating phase mask
INFINEON TECHNOLOGIES AG22 citations90
US6631511B2Oct 7, 2003
Generating mask layout data for simulation of lithographic processes
INFINEON TECHNOLOGIES AG48 citations90
US6686098B2Feb 3, 2004
Lithography method and lithography mask
INFINEON TECHNOLOGIES AG19 citations88
US6635388B1Oct 21, 2003
Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask
INFINEON TECHNOLOGIES AG4 citations61