Inventor

GRIESINGER UWE

DE5 patents

⚠️ This page may combine multiple inventors who share the name “GRIESINGER UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

4 patents

US6660437B2Dec 9, 2003

Alternating phase mask

INFINEON TECHNOLOGIES AG22 citations90

US6838216B2Jan 4, 2005

Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus

INFINEON TECHNOLOGIES AG9 citations70

US6635388B1Oct 21, 2003

Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask

INFINEON TECHNOLOGIES AG4 citations61

US6835506B2Dec 28, 2004

Method for producing a photomask and corresponding photomask

INFINEON TECHNOLOGIES AG0 citations48

SIEMENS AG

1 patent

US6466373B1Oct 15, 2002

Trimming mask with semitransparent phase-shifting regions

SIEMENS AG7 citations69