Inventor
HEISSMEIER MICHAEL
DE3 patents
Patents
3 patentsUS6730463B2May 4, 2004
Method for determining and removing phase conflicts on alternating phase masks
INFINEON TECHNOLOGIES AG29 citations90
US6660437B2Dec 9, 2003
Alternating phase mask
INFINEON TECHNOLOGIES AG22 citations90
US6680151B2Jan 20, 2004
Alternating phase mask
INFINEON TECHNOLOGIES AG14 citations82