Inventor
LUDWIG BURKHARD
DE12 patents
⚠️ This page may combine multiple inventors who share the name “LUDWIG BURKHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
10 patentsUS6543045B2Apr 1, 2003
Method for detecting and automatically eliminating phase conflicts on alternating phase masks
INFINEON TECHNOLOGIES AG27 citations91
US6730463B2May 4, 2004
Method for determining and removing phase conflicts on alternating phase masks
INFINEON TECHNOLOGIES AG29 citations90
US6660437B2Dec 9, 2003
Alternating phase mask
INFINEON TECHNOLOGIES AG22 citations90
US6680151B2Jan 20, 2004
Alternating phase mask
INFINEON TECHNOLOGIES AG14 citations82
US6981241B2Dec 27, 2005
Method for eliminating phase conflict centers in alternating phase masks, and method for producing alternating phase masks
INFINEON TECHNOLOGIES AG7 citations72
US6957414B2Oct 18, 2005
Method for determining the ability to project images of integrated semiconductor circuits onto alternating phase masks
INFINEON TECHNOLOGIES AG11 citations72
US6493865B2Dec 10, 2002
Method of producing masks for fabricating semiconductor structures
INFINEON TECHNOLOGIES AG6 citations62
US6913983B1Jul 5, 2005
Integrated circuit arrangement and method for the manufacture thereof
INFINEON TECHNOLOGIES AG0 citations51
US6834377B2Dec 21, 2004
Method for checking an integrated electrical circuit
INFINEON TECHNOLOGIES AG1 citations49
US7354683B2Apr 8, 2008
Lithography mask for imaging of convex structures
INFINEON TECHNOLOGIES AG0 citations48