Inventor
CUTLER CHARLOTTE A
US5 patents
Patents
5 patentsUS10114288B2Oct 30, 2018
Silicon-containing underlayers
ROHM & HAAS ELECT MAT3 citations71
US10007184B2Jun 26, 2018
Silicon-containing underlayers
ROHM & HAAS ELECT MAT1 citations51
US11733609B2Aug 22, 2023
Silicon-containing underlayers
ROHM & HAAS ELECT MAT0 citations50
US11506979B2Nov 22, 2022
Method using silicon-containing underlayers
ROHM & HAAS ELECT MAT0 citations50
US11360387B2Jun 14, 2022
Silicon-containing underlayers
ROHM & HAAS ELECT MAT0 citations50