Inventor
COULTAS DENNIS KEITH
3 patents
Patents
3 patentsUS5767628AJun 16, 1998
Helicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channel
IBM98 citations95
US5866985AFeb 2, 1999
Stable matching networks for plasma tools
IBM69 citations93
US3997846ADec 14, 1976
Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
IBM4 citations58