Inventor
KELLER JOHN HOWARD
8 patents
⚠️ This page may combine multiple inventors who share the name “KELLER JOHN HOWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS5767628AJun 16, 1998
Helicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channel
IBM98 citations95
US5866985AFeb 2, 1999
Stable matching networks for plasma tools
IBM69 citations93
US5650032AJul 22, 1997
Apparatus for producing an inductive plasma for plasma processes
IBM92 citations93
US5783102AJul 21, 1998
Negative ion deductive source for etching high aspect ratio structures
IBM45 citations91
US5686796ANov 11, 1997
Ion implantation helicon plasma source with magnetic dipoles
IBM49 citations87
US3997846ADec 14, 1976
Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
IBM4 citations58