Inventor
SMYKA JONATHAN W
US8 patents
⚠️ This page may combine multiple inventors who share the name “SMYKA JONATHAN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
7 patentsUS9947514B2Apr 17, 2018
Plasma RF bias cancellation system
MKS INSTR INC42 citations93
US11315757B2Apr 26, 2022
Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications
MKS INSTR INC7 citations85
US11935726B2Mar 19, 2024
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC6 citations84
US11158488B2Oct 26, 2021
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC13 citations84
US10727027B2Jul 28, 2020
Adaptive periodic waveform controller
MKS INSTR INC1 citations72
US11715624B2Aug 1, 2023
Adaptive pulse shaping with post match sensor
MKS INSTR INC1 citations62
US11367592B2Jun 21, 2022
Adaptive periodic waveform controller
MKS INSTR INC0 citations62