Inventor

STRAHL THOMAS L

US3 patents

Patents

3 patents

US4717461AJan 5, 1988

System and method for processing workpieces

MACHINE TECHNOLOGY INC396 citations93

US4664935AMay 12, 1987

Thin film deposition apparatus and method

MACHINE TECHNOLOGY INC68 citations92

US4818561AApr 4, 1989

Thin film deposition apparatus and method

MACHINE TECHNOLOGY INC13 citations70