Inventor
CHOW MING-FEA
US6 patents
⚠️ This page may combine multiple inventors who share the name “CHOW MING-FEA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS4702792AOct 27, 1987
Method of forming fine conductive lines, patterns and connectors
IBM120 citations95
US4810601AMar 7, 1989
Top imaged resists
IBM50 citations92
US4464458AAug 7, 1984
Process for forming resist masks utilizing O-quinone diazide and pyrene
IBM10 citations72
US4474864AOct 2, 1984
Method for dose calculation of photolithography projection printers through bleaching of photo-active compound in a photoresist
IBM16 citations71
US4942108AJul 17, 1990
Process of making diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers
IBM13 citations69