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Inventor
NONAKA MIKIO
US
2 patents
⚠️ This page may combine multiple inventors who share the name “NONAKA MIKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKUDA SEISAKUSHO
1 patent
US5201994A
Apr 13, 1993
Dry etching method
TOKUDA SEISAKUSHO
33 citations
89
TOSHIBA KK
1 patent
US5846886A
Dec 8, 1998
Metal film etching method
TOSHIBA KK
22 citations
87