Inventor
COMULADA JR RALPH R
US5 patents
Patents
5 patentsUS6171513B1Jan 9, 2001
Chemical-mechanical polishing system having a bi-material wafer backing film and two-piece wafer carrier
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Probe positioning actuator
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Apparatus for displacing an article during screening
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US6659002B2Dec 9, 2003
Screening apparatus with trailing squeegee and method of screening
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US6595136B2Jul 22, 2003
Method for displacing an article during screening
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