P

Inventor

GOMMORI KAZUHIKO

JP5 patents
⚠️ This page may combine multiple inventors who share the name “GOMMORI KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI ELECTR ENG

4 patents
US6631726B1Oct 14, 2003

Apparatus and method for processing a substrate

HITACHI ELECTR ENG44 citations91
US5092011AMar 3, 1992

Disk washing apparatus

HITACHI ELECTR ENG41 citations90
US6418640B1Jul 16, 2002

Drying apparatus for a substrate and drying method thereof

HITACHI ELECTR ENG24 citations86
US6421932B2Jul 23, 2002

Method and apparatus for drying substrate plates

HITACHI ELECTR ENG12 citations71

HITACHI HIGH TECH ELECT ENG CO

1 patent
US6821906B2Nov 23, 2004

Method and apparatus for treating surface of substrate plate

HITACHI HIGH TECH ELECT ENG CO43 citations90