Inventor
STUEHLER JOCHEN
DE3 patents
Patents
3 patentsUS6678240B2Jan 13, 2004
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG27 citations90
US7301622B2Nov 27, 2007
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG6 citations71
US6934011B2Aug 23, 2005
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG11 citations71