Inventor

STOFFELS FREERK ADRIAAN

NL2 patents

Patents

2 patents

US7580113B2Aug 25, 2009

Method of reducing a wave front aberration, and computer program product

ASML NETHERLANDS BV12 citations81

US7903234B2Mar 8, 2011

Lithographic apparatus, device manufacturing method and computer program product

ASML NETHERLANDS BV0 citations39