Inventor
TACHIBANA MITSUHIRO
JP33 patents
⚠️ This page may combine multiple inventors who share the name “TACHIBANA MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
20 patentsUS9991138B2Jun 5, 2018
Etching method and etching apparatus
TOKYO ELECTRON LTD337 citations98
US6399484B1Jun 4, 2002
Semiconductor device fabricating method and system for carrying out the same
TOKYO ELECTRON LTD88 citations97
US6036782AMar 14, 2000
Shower head
TOKYO ELECTRON LTD109 citations97
US5997651ADec 7, 1999
Heat treatment apparatus
TOKYO ELECTRON LTD68 citations96
US5303671AApr 19, 1994
System for continuously washing and film-forming a semiconductor wafer
TOKYO ELECTRON LTD107 citations96
US6465347B2Oct 15, 2002
Tungsten film forming method
TOKYO ELECTRON LTD53 citations94
US6913996B2Jul 5, 2005
Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring
TOKYO ELECTRON LTD20 citations92
US5972114AOct 26, 1999
Film deposition apparatus with anti-adhesion film and chamber cooling means
TOKYO ELECTRON LTD32 citations92
US9111747B2Aug 18, 2015
Film deposition apparatus, substrate processing apparatus and film deposition method
TOKYO ELECTRON LTD15 citations84
US6660101B1Dec 9, 2003
Method and apparatus for cleaning film deposition device
TOKYO ELECTRON LTD11 citations74
US9583312B2Feb 28, 2017
Film formation device, substrate processing device, and film formation method
TOKYO ELECTRON LTD5 citations73
US6346425B1Feb 12, 2002
Vapor-phase processing method capable of eliminating particle formation
TOKYO ELECTRON LTD8 citations72
US10903083B2Jan 26, 2021
Substrate processing method, substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD2 citations71
US6331483B1Dec 18, 2001
Method of film-forming of tungsten
TOKYO ELECTRON LTD13 citations71
US10460946B2Oct 29, 2019
Naturally oxidized film removing method and naturally oxidized film removing device
TOKYO ELECTRON LTD1 citations62
US7063871B2Jun 20, 2006
CVD process capable of reducing incubation time
TOKYO ELECTRON LTD4 citations62
US12237173B2Feb 25, 2025
Substrate processing method, substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations61
US8895456B2Nov 25, 2014
Method of depositing a film
TOKYO ELECTRON LTD2 citations61
US12283489B2Apr 22, 2025
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations60
US7592256B2Sep 22, 2009
Method of forming tungsten film
TOKYO ELECTRON LTD1 citations51
HITACHI SOFTWARE ENG
9 patentsUS6767748B2Jul 27, 2004
Spotting pin, spotting device and method for spotting biomolecules
HITACHI SOFTWARE ENG34 citations91
US6646271B2Nov 11, 2003
Method and apparatus for reading fluorescence
HITACHI SOFTWARE ENG45 citations90
US6835352B2Dec 28, 2004
Spotting pin
HITACHI SOFTWARE ENG20 citations89
US6787349B1Sep 7, 2004
Biochip reader and labeling reagent
HITACHI SOFTWARE ENG9 citations73
US6582954B2Jun 24, 2003
Biopolymer detector
HITACHI SOFTWARE ENG8 citations73
US6875603B2Apr 5, 2005
Apparatus for detecting biopolymers and cartridge
HITACHI SOFTWARE ENG3 citations62
US6790651B2Sep 14, 2004
Hybridization reaction apparatus and hybridization method
HITACHI SOFTWARE ENG5 citations62
US6726883B2Apr 27, 2004
Spotting pin
HITACHI SOFTWARE ENG3 citations59
US7135331B2Nov 14, 2006
Apparatus for detecting biopolymers and cartridge
HITACHI SOFTWARE ENG0 citations51