Inventor

LIN ZHENGCHENG

US2 patents

⚠️ This page may combine multiple inventors who share the name “LIN ZHENGCHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US9110039B2Aug 18, 2015

Auto-focus system and methods for die-to-die inspection

KLA TENCOR CORP3 citations54

KLA CORP

1 patent

US12360058B2Jul 15, 2025

Integration of an optical height sensor in mask inspection tools

KLA CORP0 citations42