Inventor
TSURUMAKI HIDEYUKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TSURUMAKI HIDEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
4 patentsUS7608845B2Oct 27, 2009
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect
NUFLARE TECHNOLOGY INC11 citations83
US7619230B2Nov 17, 2009
Charged particle beam writing method and apparatus and readable storage medium
NUFLARE TECHNOLOGY INC10 citations82
US9589766B2Mar 7, 2017
Apparatus and method for calculating drawing speeds of a charged particle beam
NUFLARE TECHNOLOGY INC0 citations37
US9460892B2Oct 4, 2016
Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations35