Inventor
MARSOLLEK PASCAL
DE4 patents
Patents
4 patentsUS10386732B2Aug 20, 2019
Bearing assembly for a lithography system, and lithography system
ZEISS CARL SMT GMBH3 citations65
US11169359B2Nov 9, 2021
Method for positioning a component of an optical system
ZEISS CARL SMT GMBH0 citations58
US10108094B2Oct 23, 2018
Projection exposure apparatus with near-field manipulator
ZEISS CARL SMT GMBH0 citations49
US10025200B2Jul 17, 2018
Optimum arrangement of actuator and sensor points on an optical element
ZEISS CARL SMT GMBH0 citations49