Inventor
SHIH WANG CHENG
TW5 patents
Patents
5 patentsUS11796909B2Oct 24, 2023
Structure and method of reticle pod having inspection window
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11314164B2Apr 26, 2022
Structure and method of reticle pod having inspection window
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12248245B2Mar 11, 2025
Structure and method of reticle pod having inspection window
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12087579B2Sep 10, 2024
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11036129B2Jun 15, 2021
Photomask and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60