Inventor
SAMANIEGO MICHAEL
DE4 patents
Patents
4 patentsUS9494483B2Nov 15, 2016
Measuring system for measuring an imaging quality of an EUV lens
ZEISS CARL SMT GMBH5 citations68
US11441970B2Sep 13, 2022
Measurement apparatus for measuring a wavefront aberration of an imaging optical system
ZEISS CARL SMT GMBH0 citations49
US11391643B2Jul 19, 2022
Method and device for calibrating a diffractive measuring structure
ZEISS CARL SMT GMBH0 citations44
US10996566B2May 4, 2021
Appliance for the moiré measurement of an optical test object
ZEISS CARL SMT GMBH0 citations44