Inventor
GOMM TROY ALAN
US8 patents
Patents
8 patentsUS10177024B2Jan 8, 2019
High temperature substrate pedestal module and components thereof
LAM RES CORP371 citations98
US11289355B2Mar 29, 2022
Electrostatic chuck for use in semiconductor processing
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US10655225B2May 19, 2020
Substrate pedestal module including backside gas delivery tube and method of making
LAM RES CORP4 citations82
US9738975B2Aug 22, 2017
Substrate pedestal module including backside gas delivery tube and method of making
LAM RES CORP10 citations82
US11817341B2Nov 14, 2023
Electrostatic chuck for use in semiconductor processing
LAM RES CORP4 citations72
US11634817B2Apr 25, 2023
Substrate pedestal including backside gas-delivery tube
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US12398464B2Aug 26, 2025
Substrate pedestal including backside gas-delivery tube
LAM RES CORP0 citations61
US12387965B2Aug 12, 2025
Electrostatic chuck for use in semiconductor processing
LAM RES CORP0 citations60