Inventor

TAKATSUJI SHIGERU

JP3 patents

Patents

3 patents

US11986867B2May 21, 2024

Substrate processing method and substrate processing apparatus

SCREEN HOLDINGS CO LTD1 citations60

US11267729B2Mar 8, 2022

In-liquid plasma generation device and liquid treatment apparatus

SCREEN HOLDINGS CO LTD0 citations59

US11742211B2Aug 29, 2023

Substrate processing method

SCREEN HOLDINGS CO LTD0 citations41