Inventor

SUEFUJI KOUICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SUEFUJI KOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US6790283B2Sep 14, 2004

Coating apparatus

TOKYO ELECTRON LTD18 citations91

US6830774B2Dec 14, 2004

Coating method

TOKYO ELECTRON LTD13 citations82

JEOL LTD

1 patent

US5130540AJul 14, 1992

Method and apparatus for automatic focusing of scanning electron microscope

JEOL LTD20 citations80