Inventor
MALLON THOMAS G
US11 patents
⚠️ This page may combine multiple inventors who share the name “MALLON THOMAS G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
9 patentsUS5516400AMay 14, 1996
Techniques for assembling polishing pads for chemical-mechanical polishing of silicon wafers
LSI LOGIC CORP83 citations96
US5310455AMay 10, 1994
Techniques for assembling polishing pads for chemi-mechanical polishing of silicon wafers
LSI LOGIC CORP91 citations96
US5667433ASep 16, 1997
Keyed end effector for CMP pad conditioner
LSI LOGIC CORP72 citations95
US5628869AMay 13, 1997
Plasma enhanced chemical vapor reactor with shaped electrodes
LSI LOGIC CORP73 citations95
US5278103AJan 11, 1994
Method for the controlled formation of voids in doped glass dielectric films
LSI LOGIC CORP82 citations95
US6109775AAug 29, 2000
Method for adjusting the density of lines and contact openings across a substrate region for improving the chemical-mechanical polishing of a thin-film later disposed thereon
LSI LOGIC CORP60 citations93
US5876838AMar 2, 1999
Semiconductor integrated circuit processing wafer having a PECVD material layer of improved thickness uniformity
LSI LOGIC CORP34 citations92
US5719084AFeb 17, 1998
Method for the controlled formation of voids in doped glass dielectric films
LSI LOGIC CORP16 citations81
US5362353ANov 8, 1994
Faraday cage for barrel-style plasma etchers
LSI LOGIC CORP19 citations73