Inventor
LEE YOU-KYOUNG
KR11 patents
Patents
11 patentsUS7081409B2Jul 25, 2006
Methods of producing integrated circuit devices utilizing tantalum amine derivatives
SAMSUNG ELECTRONICS CO LTD50 citations96
US7098131B2Aug 29, 2006
Methods for forming atomic layers and thin films including tantalum nitride and devices including the same
SAMSUNG ELECTRONICS CO LTD48 citations92
US7833855B2Nov 16, 2010
Methods of producing integrated circuit devices utilizing tantalum amine derivatives
SAMSUNG ELECTRONICS CO LTD10 citations84
US7452811B2Nov 18, 2008
Method for forming a wiring of a semiconductor device, method for forming a metal layer of a semiconductor device and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD10 citations84
US7105444B2Sep 12, 2006
Method for forming a wiring of a semiconductor device, method for forming a metal layer of a semiconductor device and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD6 citations73
US7056776B2Jun 6, 2006
Semiconductor devices having metal containing N-type and P-type gate electrodes and methods of forming the same
SAMSUNG ELECTRONICS CO LTD8 citations73
US6686120B2Feb 3, 2004
Photoresist composition and method of forming pattern using the same
SAMSUNG ELECTRONICS CO LTD8 citations73
US7144662B2Dec 5, 2006
Photoresist composition having a high heat resistance
SAMSUNG ELECTRONICS CO LTD2 citations62
US7425479B2Sep 16, 2008
Method of manufacturing a thin film transistor array panel
SAMSUNG ELECTRONICS CO LTD2 citations61
US7378230B2May 27, 2008
Photoresist composition for multi-micro nozzle head coater
SAMSUNG ELECTRONICS CO LTD3 citations60
US6893791B2May 17, 2005
Photoresist composition and method of forming pattern using the same
SAMSUNG ELECTRONICS CO LTD1 citations52