Inventor

HAN WOO-SUNG

KR29 patents

⚠️ This page may combine multiple inventors who share the name “HAN WOO-SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAN WOO-SUNG

SAMSUNG ELECTRONICS CO LTD

Photo mask and method for manufacturing same

Projection method and projection system and mask therefor

Mask and method for manufacturing the same

Method of forming a pattern on a substrate having a step change in height

Method for forming a fine pattern on a semiconductor having a step therein

Mask pattern of a semiconductor device and a method of manufacturing fine patterns using the same

Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare

Magnetic fluid pump and a method for transporting fluid using the same

Gas contamination-measuring apparatus for use with an ultraviolet-emitting laser source

Aperture for off-axis illumination and projection exposure apparatus employing the same

Projection exposure systems

Projection method and projection system and mask therefor

Projection method and projection system and mask therefor

Projection method and projection system and mask therefor

Methods for forming fine pattern of semiconductor device

Method of manufacturing a semiconductor device using a polysilicon etching mask

Semiconductor memory device having high electrical performance and mask and photolithography friendliness

Cleaning composition and method of cleaning a semiconductor device using the same

Semiconductor memory device having high electrical performance and mask and photolithography friendliness

Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare

Polymer having butadiene sulfone repeating unit and resist composition comprising the same

Binary photomask having a compensation layer

SAMSUNG ELECTRO MECH

Electronic component package and method of manufacturing the same

Electronic component package and method of manufacturing the same

KIM YU-SIK

Light emitting device including a light emitting element mounted on a sub-mount

Sub-mount, light emitting device including sub-mount and methods of manufacturing such sub-mount and/or light emitting device

JUNG SUNG-GON

Method of forming line/space patterns

HAN WOO-SUNG

Method and apparatus for recording a hologram from a mask pattern by the use of total internal reflection holography and hologram manufactured by the method

PARK DONG-WOON

Methods of arranging mask patterns and associated apparatus