Inventor

KORZENSKI MICHAEL B

US30 patents

⚠️ This page may combine multiple inventors who share the name “KORZENSKI MICHAEL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KORZENSKI MICHAEL B

ADVANCED TECH MATERIALS

Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon

Oxidizing aqueous cleaner for the removal of post-etch residues

Supercritical fluid-assisted deposition of materials on semiconductor substrates

Treatment of supercritical fluid utilized in semiconductor manufacturing applications

Supercritical carbon dioxide/chemical formulation for ashed and unashed aluminum post-etch residue removal

Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations

Compositions and methods for high-efficiency cleaning/polishing of semiconductor wafers

Supercritical carbon dioxide/chemical formulation for removal of photoresists

Removal of particle contamination on patterned silicon/silicon dioxide using supercritical carbon dioxide/chemical formulations

Low pH mixtures for the removal of high density implanted resist

Apparatus and method for stripping solder metals during the recycling of waste electrical and electronic equipment

Non-fluoride containing supercritical fluid composition for removal of ion-implant photoresist

Enhancement of silicon-containing particulate material removal using supercritical fluid-based compositions

Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations

Oxidizing aqueous cleaner for the removal of post-etch residues

Compositions and methods for the selective removal of silicon nitride

ENTEGRIS INC

Apparatus and method for stripping solder metals during the recycling of waste electrical and electronic equipment

Compositions and methods for the selective removal of silicon nitride

Method for recycling of obsolete printed circuit boards

CHEN TIANNIU

Apparatus and method for stripping solder metals during the recycling of waste electrical and electronic equipment

Lithographic tool in situ clean formulations

RATH MELISSA K

Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant

Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate

VISINTIN PAMELA M

Formulations for cleaning ion-implanted photoresist layers from microelectronic devices

Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon

BROSSEAU André

Method for recycling of obsolete printed circuit boards

COOPER EMANUEL I

Compositions and methods for the selective removal of silicon nitride

MINSEK DAVID W

Oxidizing aqueous cleaner for the removal of post-etch residues

KORZENSKI MICHAEL B

Sustainable process for reclaiming precious metals and base metals from e-waste

POE SARAH L

Method for the recovery of lithium cobalt oxide from lithium ion batteries