Inventor
OKABE TAKAFUMI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “OKABE TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
17 patentsUS7020350B2Mar 28, 2006
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections
HITACHI LTD42 citations96
US6799130B2Sep 28, 2004
Inspection method and its apparatus, inspection system
HITACHI LTD56 citations96
US4731853AMar 15, 1988
Three-dimensional vision system
HITACHI LTD88 citations94
US7142708B2Nov 28, 2006
Defect detection method and its apparatus
HITACHI LTD31 citations93
US7127126B2Oct 24, 2006
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections
HITACHI LTD29 citations93
US6927847B2Aug 9, 2005
Method and apparatus for inspecting pattern defects
HITACHI LTD24 citations93
US6879392B2Apr 12, 2005
Method and apparatus for inspecting defects
HITACHI LTD19 citations93
US6841403B2Jan 11, 2005
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data
HITACHI LTD35 citations93
US6797526B2Sep 28, 2004
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data
HITACHI LTD23 citations93
US7333677B2Feb 19, 2008
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections
HITACHI LTD12 citations84
US7330248B2Feb 12, 2008
Method and apparatus for inspecting defects
HITACHI LTD15 citations84
US6566671B1May 20, 2003
Microscopic defect inspection apparatus and method thereof, as well as positional shift calculation circuit therefor
HITACHI LTD13 citations83
US7869966B2Jan 11, 2011
Inspection method and its apparatus, inspection system
HITACHI LTD6 citations74
US7110105B2Sep 19, 2006
Method and apparatus for inspecting pattern defects
HITACHI LTD10 citations74
US7903249B2Mar 8, 2011
Method and apparatus for inspecting pattern defects
HITACHI LTD3 citations63
US7711178B2May 4, 2010
Pattern inspection method and its apparatus
HITACHI LTD5 citations63
US7489395B2Feb 10, 2009
Method and apparatus for inspecting pattern defects
HITACHI LTD0 citations52
HITACHI HIGH TECH CORP
9 patentsUS7388979B2Jun 17, 2008
Method and apparatus for inspecting pattern defects
HITACHI HIGH TECH CORP136 citations99
US6900888B2May 31, 2005
Method and apparatus for inspecting a pattern formed on a substrate
HITACHI HIGH TECH CORP38 citations96
US8005292B2Aug 23, 2011
Method and apparatus for inspecting pattern defects
HITACHI HIGH TECH CORP17 citations93
US7792352B2Sep 7, 2010
Method and apparatus for inspecting pattern defects
HITACHI HIGH TECH CORP17 citations93
US7508973B2Mar 24, 2009
Method of inspecting defects
HITACHI HIGH TECH CORP37 citations93
US7433508B2Oct 7, 2008
Pattern inspection method and its apparatus
HITACHI HIGH TECH CORP21 citations93
US7949178B2May 24, 2011
Pattern inspection method and its apparatus
HITACHI HIGH TECH CORP7 citations84
US7372561B2May 13, 2008
Method and apparatus for inspecting defects and a system for inspecting defects
HITACHI HIGH TECH CORP15 citations84
US7646477B2Jan 12, 2010
Method and apparatus for inspecting a pattern formed on a substrate
HITACHI HIGH TECH CORP4 citations63