Inventor

KUANG WILLIAM W

US2 patents

⚠️ This page may combine multiple inventors who share the name “KUANG WILLIAM W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US10407771B2Sep 10, 2019

Atomic layer deposition chamber with thermal lid

APPLIED MATERIALS INC12 citations81

CHANG YU

1 patent

US8618446B2Dec 31, 2013

Substrate support with substrate heater and symmetric RF return

CHANG YU12 citations80