Inventor
TANAKA YOSHITSUGU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA YOSHITSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6565662B2May 20, 2003
Vacuum processing apparatus for semiconductor process
TOKYO ELECTRON LTD60 citations94
US7955922B2Jun 7, 2011
Manufacturing method of fin-type field effect transistor
TOKYO ELECTRON LTD3 citations61
US6634370B2Oct 21, 2003
Liquid treatment system and liquid treatment method
TOKYO ELECTRON LTD6 citations60
TANAKA YOSHITSUGU
2 patentsUS8785334B2Jul 22, 2014
Select transistor, method for making select transistor, memory device, and method for manufacturing memory device
TANAKA YOSHITSUGU0 citations43
US8570825B2Oct 29, 2013
Temperature sensor, method of manufacturing the temperature sensor, semiconductor device, method of manufacturing the semiconductor device, and method of controlling the semiconductor device
TANAKA YOSHITSUGU0 citations43