Inventor
OKUDA HIROHITO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “OKUDA HIROHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS7602962B2Oct 13, 2009
Method of classifying defects using multiple inspection machines
HITACHI HIGH TECH CORP27 citations93
US7424146B2Sep 9, 2008
Defect inspection method
HITACHI HIGH TECH CORP24 citations92
US7075077B2Jul 11, 2006
Method of observing a specimen using a scanning electron microscope
HITACHI HIGH TECH CORP23 citations92
US7873205B2Jan 18, 2011
Apparatus and method for classifying defects using multiple classification modules
HITACHI HIGH TECH CORP9 citations84
US7756320B2Jul 13, 2010
Defect classification using a logical equation for high stage classification
HITACHI HIGH TECH CORP10 citations84
US7734082B2Jun 8, 2010
Defect inspection method
HITACHI HIGH TECH CORP14 citations84
US7521676B2Apr 21, 2009
Method and apparatus for inspecting pattern defects and mirror electron projection type or multi-beam scanning type electron beam apparatus
HITACHI HIGH TECH CORP16 citations84
US7034299B2Apr 25, 2006
Transmission electron microscope system and method of inspecting a specimen using the same
HITACHI HIGH TECH CORP15 citations84
US7420167B2Sep 2, 2008
Apparatus and method for electron beam inspection with projection electron microscopy
HITACHI HIGH TECH CORP6 citations63
HITACHI LTD
8 patentsUS7231079B2Jun 12, 2007
Method and system for inspecting electronic circuit pattern
HITACHI LTD44 citations92
US7170593B2Jan 30, 2007
Method of reviewing detected defects
HITACHI LTD25 citations92
US6855930B2Feb 15, 2005
Defect inspection apparatus and defect inspection method
HITACHI LTD26 citations92
US6622054B1Sep 16, 2003
Method monitoring a quality of electronic circuits and its manufacturing condition and system for it
HITACHI LTD36 citations90
US7583832B2Sep 1, 2009
Method and its apparatus for classifying defects
HITACHI LTD18 citations84
US7205555B2Apr 17, 2007
Defect inspection apparatus and defect inspection method
HITACHI LTD8 citations74
US6965429B2Nov 15, 2005
Method of reviewing detected defects
HITACHI LTD10 citations74
US7181060B2Feb 20, 2007
Defect inspection method
HITACHI LTD9 citations72