Inventor
YOST DENNIS
US6 patents
Patents
6 patentsUS6340435B1Jan 22, 2002
Integrated low K dielectrics and etch stops
APPLIED MATERIALS INC536 citations98
US6858153B2Feb 22, 2005
Integrated low K dielectrics and etch stops
APPLIED MATERIALS INC256 citations97
US6669858B2Dec 30, 2003
Integrated low k dielectrics and etch stops
APPLIED MATERIALS INC47 citations95
US7227244B2Jun 5, 2007
Integrated low k dielectrics and etch stops
APPLIED MATERIALS INC27 citations92
US7718009B2May 18, 2010
Cleaning submicron structures on a semiconductor wafer surface
APPLIED MATERIALS INC18 citations82
US7521374B2Apr 21, 2009
Method and apparatus for cleaning semiconductor substrates
APPLIED MATERIALS INC0 citations51