Inventor
TANG BETTY
US6 patents
Patents
6 patentsUS6340435B1Jan 22, 2002
Integrated low K dielectrics and etch stops
APPLIED MATERIALS INC536 citations98
US6211092B1Apr 3, 2001
Counterbore dielectric plasma etch process particularly useful for dual damascene
APPLIED MATERIALS INC132 citations98
US6858153B2Feb 22, 2005
Integrated low K dielectrics and etch stops
APPLIED MATERIALS INC256 citations97
US6669858B2Dec 30, 2003
Integrated low k dielectrics and etch stops
APPLIED MATERIALS INC47 citations95
US6399511B2Jun 4, 2002
Plasma etch process in a single inter-level dielectric etch
APPLIED MATERIALS INC49 citations95
US7227244B2Jun 5, 2007
Integrated low k dielectrics and etch stops
APPLIED MATERIALS INC27 citations92