Inventor
KOESTER LUDWIG
DE3 patents
Patents
3 patentsUS8038895B2Oct 18, 2011
Method and appartus for detection of mechanical defects in an ingot piece composed of semiconductor material
SILTRONIC AG3 citations53
US12550680B2Feb 10, 2026
Method for testing the stress robustness of a semiconductor substrate
SILTRONIC AG0 citations49
US12313578B2May 27, 2025
Method for producing semiconductor wafers
SILTRONIC AG0 citations42