Inventor
HAMAMURA YUUICHI
JP5 patents
Patents
5 patentsUS5825035AOct 20, 1998
Processing method and apparatus using focused ion beam generating means
HITACHI LTD140 citations97
US5583344ADec 10, 1996
Process method and apparatus using focused ion beam generating means
HITACHI LTD73 citations96
US5504340AApr 2, 1996
Process method and apparatus using focused ion beam generating means
HITACHI LTD94 citations96
US5447614ASep 5, 1995
Method of processing a sample using a charged beam and reactive gases and system employing the same
HITACHI LTD31 citations92
US5342448AAug 30, 1994
Apparatus for processing a sample using a charged beam and reactive gases
HITACHI LTD39 citations92