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Inventor
NOLL KATHRYN
US
2 patents
Patents
2 patents
US6641705B2
Nov 4, 2003
Apparatus and method for reducing differential sputter rates
FEI CO
44 citations
90
US6322672B1
Nov 27, 2001
Method and apparatus for milling copper interconnects in a charged particle beam system
FEI CO
39 citations
89