Inventor · disambiguated record
Stephen Fox
Also filed as: FOX STEPHEN R · FOX STEPHEN RICHARD
4 granted patents·1 pending application·31 citations·filing 2001–2004
72Inventor score
Technology areasH10W
Files withIBM5
Top patents by PatentIndex Score
5 records- 0169US6495429B1Controlling internal thermal oxidation and eliminating deep divots in SIMOX by chlorine-based annealingIBM·Filed 2002·Granted Dec 17, 2002·20 cites·33 claims
- 0261US6784072B2Control of buried oxide in SIMOXIBM·Filed 2002·Granted Aug 31, 2004·9 cites·17 claims
- 0346US6967376B2Divot reduction in SIMOX layersIBM·Filed 2004·Granted Nov 22, 2005·2 cites·7 claims
- 0441US7492008B2Control of buried oxide in SIMOXIBM·Filed 2004·Granted Feb 17, 2009·0 cites·10 claims
- 0536US2002190318A1Divot reduction in SIMOX layersIBM·Filed 2001·Application pending·0 cites
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