Inventor
KOO JA-EUNG
KR14 patents
Patents
14 patentsUS6976902B2Dec 20, 2005
Chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD12 citations83
US6924207B2Aug 2, 2005
Method of fabricating a metal-insulator-metal capacitor
SAMSUNG ELECTRONICS CO LTD18 citations83
US7166019B2Jan 23, 2007
Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same
SAMSUNG ELECTRONICS CO LTD14 citations82
US10032890B2Jul 24, 2018
Method of manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD7 citations77
US7348277B2Mar 25, 2008
Methods of fabricating semiconductor device using sacrificial layer
SAMSUNG ELECTRONICS CO LTD8 citations73
US10056466B2Aug 21, 2018
Methods for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations66
US9870950B2Jan 16, 2018
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations65
US11189572B2Nov 30, 2021
Maintaining height of alignment key in semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations62
US11361995B2Jun 14, 2022
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US10910266B2Feb 2, 2021
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US11648644B2May 16, 2023
Polishing pad conditioning apparatus
SAMSUNG ELECTRONICS CO LTD0 citations55
US12426305B2Sep 23, 2025
Semiconductor device including transistor having source/drain contract with convex curved surface
SAMSUNG ELECTRONICS CO LTD0 citations51
US11791173B2Oct 17, 2023
Substrate cleaning equipment, substrate treatment system including the same, and method of fabricating semiconductor device using the substrate cleaning equipment
SAMSUNG ELECTRONICS CO LTD0 citations43
US7595253B2Sep 29, 2009
Method of forming the semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations37