Inventor
FRANKEN DOMINICUS JACOBUS PETR
NL22 patents
⚠️ This page may combine multiple inventors who share the name “FRANKEN DOMINICUS JACOBUS PETR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
19 patentsUS6788386B2Sep 7, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV75 citations95
US7436484B2Oct 14, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations92
US6765712B2Jul 20, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV30 citations88
US7397531B2Jul 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations84
US7151588B2Dec 19, 2006
Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus
ASML NETHERLANDS BV18 citations84
US7362415B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations80
US7035056B2Apr 25, 2006
Piezoelectric actuator and a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV16 citations80
US7110083B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations74
US7116399B2Oct 3, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US6734949B2May 11, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7049592B2May 23, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations71
US7161658B2Jan 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US6967756B2Nov 22, 2005
Lithographic apparatus device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV4 citations62
US7471373B2Dec 30, 2008
Lithographic apparatus with patterning device position determination
ASML NETHERLANDS BV3 citations60
US7126671B2Oct 24, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations58
US7460208B2Dec 2, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations55
US7307262B2Dec 11, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations54
US7525637B2Apr 28, 2009
Assembly
ASML NETHERLANDS BV0 citations52
US7474378B2Jan 6, 2009
Assembly, a lithographic apparatus, and a device manufacturing method
ASML NETHERLANDS BV1 citations52