Inventor

HOEKS MARTINUS HENDRICUS HENDR

NL2 patents

Patents

2 patents

US7092231B2Aug 15, 2006

Chuck, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV41 citations89

US7362415B2Apr 22, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV15 citations80